FIB/SEM - FEI Helios NanoLab 600i dual beam - Status: In Use
  • Current Status: In Use
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $100.50/Hour
    • External Affiliated Commercial/Industrial: $193.50/Hour
    • External Commercial/Industrial: $258.00/Hour
    • External International Academic: $134.00/Hour
    • Internal Standard: $67.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NRB (0557)
  • Room: Room (8E)
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski
 The FEI Helios NanoLab 600i DualBeam system integrates focused ion and scanning electron beams for FIB and SEM functionality in one instrument.

Instrument Specifications:

  • Elstar SEM column; 0.3 - 30 kV operating voltage with <1 nm resolution
  • Field-free (high-resolution) and immersion (ultrahigh-resolution) SEM modes
  • Schottky field emission gun electron source
  • Sidewinder FIB column with 2 - 30 kV operating voltage; 1 pA - 65 nA beam currents
  • Ga liquid metal ion source
  • Everhart-Thornley and through lens detectors; configurable for SE+BSE or BSE only imaging
  • In-situ Pt deposition GIS
  • Omniprobe AutoProbe 200 in-situ micromanipulator
  • EDAX Octane Elite (70 mm squared active area) SDD energy dispersive spectroscopy system
  • EDAX Velocity CMOS EBSD camera
  • EDAX TEAM EDS and EBSD acquisition and analysis software
  • EDAX OIM 8 texture and crystallographic analysis software
  • Auto Slice and View serial sectioning software

    • YouTube video demonstrating what is covered in basic training of the Helios

    YouTube video tutorial on use of the Helios to prepare lamellas

    Zoom workshop on dual beam FIB/SEM tips, tricks, and other useful info (recorded 11/19/21)

    TRAINING REQUIREMENTS:

    1. Please create an RSC user account with a PI-approved funding source.

    2. Please complete RSC general safety training.

    3. Please complete the Radiation Safety Short Course AND obtain a dosimeter badge (regardless if you are working with radioactive or non-radioactive materials).

    4. Please complete the FIB Knowledge Training course through eLearning; submit a training request using the "Training" link at the bottom of the page and follow the instructions to be added to the course; you must complete this course regardless of any prior coursework or operational experience related to SEM or FIB you may have.

    Latest Status Log EntryApr 29, 2024 - User Report: Chamber was vented this morning and the same error "FIB lens interlock 2 failure" occurred yesterday evening. Please make sure chamber is reading a pressure before you log off (lower bottom right of beam tab). If the chamber is vented when you come in, please let us know. Also, the FIB was giving very low currents about halfway into my session. Restarted UI and cycled through beam currents and turned beam on and off multiple times. The i-beam had heated itself earlier during the session (after not being heated for approximately 17 hours). Nick flashed the i-beam again (after about 2.5 hours), and that seemed to fix it. Again, if you encounter really low i-beam currents, please let us know and make a note in the comments Thanks!
    Capabilities Training Prerequisites Calendar Contacts Docs

    • High-quality S/TEM lamella preparation via in-situ lift-out method
    • High-quality cross-section face preparation
    • High-resolution (<1 nm) top-down and cross-sectional SEM imaging
    • Nanoscale (<100 nm) to microscale (>1 um) electron and ion beam-assisted milling, patterning, and deposition
    • Automated serial sectioning and cross-section face imaging
    • Nanoscale (<100 nm) to microscale (>1 um)compositional analysis using EDS
    • Nanoscale (<100 nm) to microscale (>1 um) texture and crystallographic analysis using EBSD

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